附件 193314A
S-Y20/Y21-0/0-Z10

RSF Elektronik 光栅尺 389726-88
MSA 170.63 K grating pitch 20 µm, times 5 accuracy ±10 µm/m

HEIDENHAIN 光栅尺 526974-31
LS 187C 690 5,0 C001 .. I 4ZS14 ~1Vss 2F 01 ..

HYDAC 滤芯 1306177
0160 D 010 ON /-V-SFREE

LEINE LINDE 增量式编码器 1153644-01
XHI 861

HYDAC HFS流量开关 925727
HFS 2151-2W-0020-0060-7-B-1-A00