RSF Elektronik 光栅尺 389716-60
MSA 170.23 grating pitch 20 µm accuracy ±10 µm/m

HEIDENHAIN 编码器 826980-01
EQI1131 16 5PS15-T9 A 0,00 .. 1KA 70C 00 01 .. .. D EnDat22 37 01 FS

HEIDENHAIN 光栅尺 527389-12
LS 187 1240 3,0 ML/2 .. I 4ZS14 ~1Vss 2F 01 ..

AMO 读数头 LMK 2030S .08RI..25-20- 2,00-03S12-UJ .. -001-83
LMK 2030S .08RI..25-20- 2,00-03S12-UJ .. -001-83

RSF Elektronik 光栅尺 389718-91
MSA 170.63 grating pitch 20 µm, times 5 accuracy ±10 µm/m

AMO 读数头 LMK 2030S .08RIFA01-20- 9,00-03S12-UJ .. -001-83
LMK 2030S .08RIFA01-20- 9,00-03S12-UJ .. -001-83