RSF Elektronik 光栅尺 389718-G1
MSA 170.63 grating pitch 20 µm, times 5 accuracy ±10 µm/m

HEIDENHAIN 光栅尺体 316531-7A
Scale tape LB 302C 24640 40,000 ST 1 4444 4444

HEIDENHAIN 读数头 1311000-03
AK LIC 311 10,0000 16S15 21 3,00 E EnDat22 .. 600 m/min F9 01 ..

RSF Elektronik 光栅尺 597167-30
MSA375.65-0 K 170 10 50 LD +5V K1 S N98 2，000L121P oU

HEIDENHAIN 光栅尺 557660-78
LC 183 840 5,0 EnDat02 100 D I 0MS14 .. ~1Vss 7C 01 AE2 24 ..

HEIDENHAIN 放大器 1230779-06
IBV 3171 TTLx5 200,00 0,220 R3 OT OH 01 1,00 51B15 AIS015 16,00000 D